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WYKO Rough Surface Tester White Light Interferometer
WYKO Rough Surface Tester White Light Interferometer Setup at Nanomanufactoring Laboratory
The WYKO Rough Surface Tester (RST) Light Interferometer is a non-contact optical profiler capable of very sensitive 3D surface profilometry and surface roughness characterization. The RST Light Interferometer operates in two measurement modes, i.e., the optical phase-shifting mode and the vertical-scanning mode. The optical phase shifting mode is used for reflective, mirror-like samples while the vertical-scanning mode is used for measurements of samples with rough surfaces.
The following tables describe the technical specifications for the system, magnification, performance, environment, direction, and power requirements of the WYKO RST non-contact optical instrument:
System Specifications |
|
| Measurement Technique | 1) Optical phase-shifting 2) Vertical scanning interferometry |
| Measurement Capability | Three-dimensional surface profile measurements |
| Objective Lenses | 2.5X, (20X) |
| Field Lenses | 0.5X, 1.0X, 2.0X |
| Field of View | Variable (up to 4.9 mm - See table below) |
| Measurement Array Size |
Selectable (128 x 128 to 739 x 484) |
| Light Source | Tungsten halogen lamp |
| Stage | ±6° tip/tilt, ±90° rotation, ±2 inches x,y |
| Video Display | 9 inch black and white monitor |
| Computer System | PentiumTM Class PC |
| Signal Output | CCIR |
| Active Pixels | 739(H) x 484(V) |
| Alignment System | Fringe viewing and twin spot alignment |
| Software | WYKO VisionTM software running under Microsoft WindowsTM |
Magnification |
|||
| Magnification Objective | 2.5X | 10X | 40X |
| Interferometer Type | Michelson | Mirau | Mirau |
| Numerical Aperture | 0.075 | 0.25 | 0.50 |
| Working Distance (mm) | 2.0 | 4.0 | 3.9 |
| Field of View (mm) | 4.9 x 3.7 2.6 x 1.9 1.3 x 1.0 |
1.2 x 0.9 0.6 x 0.5 0.3 x 0.2 |
0.3 x 0.2 0.2 x 0.1 0.08 x 0.06 |
| High Resolution Spatial Sampling Interval (Aµm) | 7.6 4.0 2.0 |
1.9 1.0 0.5 |
0.5 0.2 0.1 |
| Standard Resolution Spatial Sampling Interval (Aµm) | 15.2 8.0 4.0 |
3.8 2.0 1.0 |
1.0 0.4 0.2 |
Dimensions |
|
| Total System (including vibration isolation table) | 60 in. W x 34 in. D x 57 in. H |
| Vertical Resolution | <1 Å Ra |
Power Requirements |
|
| Input Voltages | 110/220 VAC, 60/50 Hz |
| Power Consumption | 300 W |
Performance |
|
| Vertical Measurement Range | 0.1 nm to 500 µm |
| Vertical Resolution | <1 Å Ra |
| Scan Speed | 3.6/7.2 µm/sec |
Environment |
|
| Temperature Range | 0.1 nm to 500 µm |
| Humidity Range | <80%, non-condensing |
The following figures show some examples of measurements obtained from the WYKO RST White Light Interferometer. The figure below displays a cross-sectional evaluation of two nanometric cuts on a silicon workpiece under different scratch conditions1.
Cross-sectional evaluation (X profile in the right side) of two parallel nanometric cuts (left side)
The 3D scratch profile shown below, obtained with the WYKO (RST) White Light Interferometer, allows the visualization of the cut along its length. In this figure, the well defined groove edges in the left cut helped characterize the cut of a silicon workpiece as more ductile when compared to that of the right1.
